A Novel Temperature Drift Error Model for MEMS Capacitive Accelerometer
In order to enhance the temperature independence of MEMS capacitive accelerometer(MCA),a novel temperature drift error(TDE)model is proposed.On the basis of the principle of MCA,the primary cause for TDE is analyzed,and TDE model is established based on temperature variation and its square.A temperature experiment is made to test MCA,and TDE model is implemented with the test data and Back-propagation artificial neural network(BP-ANN).Then,its performance is evaluated by Mean Square Deviation(MSD),which is compared with a model based on Third-Order Least Square Method(LSM-3 model).The results show MSD compensated by TDE model is reduced more efficiently,which means TDE model can reduce TDE of MCA more accurately.It enhances the temperature independence of MCA greatly,and ensures MCA to perform stably in a long run.
MEMS capacitive accelerometer temperature drtift error structural deformation temeprature variation BP-ANN
Bing Qi Jianhua Cheng Lin Zhao
College of Automation Harbin Engineering University Harbin city,China
国际会议
重庆
英文
182-186
2017-03-25（万方平台首次上网日期，不代表论文的发表时间）