A Fast Approaching Control Method for Nano-Positioning Systems with Switched PID Controller
Nano-positioning systems as the key technology have been applied in many fields such as microelectronic engineering,biomedical engineering,optics and precision engineering,etc.,where it is required to possess high positioning accuracy,reliability and speed.In this paper,a switched PID controller based fast approaching control method was proposed for the nano-positioning systems.In order to improve the approaching speed of the nano-positioning system without a large overshoot,a switched controller consisting of a fast and a slow PID controller was formulated.The overshoot constraint of the resulting switched closed-loop system is investigated within a set of bilinear matrix inequalities,based on which the search of the controller parameters can be further processed.The proposed control method was evaluated in a nano-positioning experimental system driven by a PZT actuator and the experimental results demonstrated the effectiveness of the switched PID controller for the fast approaching operation.
nano-positioning system switched PID controller fast approaching overshoot constraint
Xinxiang Jiang Ning Cao Zhizheng Wu Zhu Zhang Mei Liu Shaorong Xie
Department of Precision Mechanical Engineering,Shanghai University,Shanghai,China
国际会议
重庆
英文
1514-1518
2017-03-25（万方平台首次上网日期，不代表论文的发表时间）