Design and Realization of a Capacitive Sensor Measurement System
This papers proposal is the design and realization of a new capacitive sensor measurement system focusing on micro-displacement on the basis of measuring principle of the variable pole pitch capacitance.First we design a capacitive sensor probe through theoretical calculation.In the second stage,we discuss the implementation of a digital measuring circuit and an efficient data acquisition system.Until now,most existing systems are too large,complex and inaccurate.But the proposed system in this paper can solve these problems.The end shows that this kind of micro-displacement capacitive sensor measurement system has good characteristics of response speed and high precision.A great deal of experimental data approve that the micro-displacement capacitive sensor measurement systems linearity is better than 0.39%,and the resolution can achieve 0.76%and the repeatability is 0.63μm.
capacitance sensor micro displacement measurement digitization
Cong Long Tao Huang
College of information Engineering,Wuhan University of Technology Wuhan,China;Key Laboratory of Fiber Optic Sensing Technology and Information Processing,Wuhan University of Technology Wuhan,China
国际会议
重庆
英文
2496-2499
2017-03-25（万方平台首次上网日期，不代表论文的发表时间）