INFLUENCE OF SURFACE MICRO-BEAMS WITH LARGE DEFLECTION ON THE FREQUENCY SHIFT OF A QUARTZ RESONATOR

摘要：

　　This paper studies the nonlinear effect of the composite quartz crystal resonator system.A vibration equation considering the nonlinear deformation effect of micro-beams is established, and then the perturbation solution of the vibration equation is solved.Frequency shift of the compound quartz crystal resonator system depends on material and geometrical parameters is illustrated for nonlinear and linear vibration.It is found that the frequency shift produces a little right (or left) translation for increasing elastic modulus (or aspect ratio) of micro-beams when taking into account the nonlinear effect of the MBs.

关键词： Quartz crystal resonator Nonlinear deformation Micro-beams Frequency shift

作者: Zhi-jian CUI Shuai-qi FAN Chi LUO

作者单位: College of Petroleum Engineering, Xian Shiyou University, Xian 710065, China Department of Mechanics, Huazhong University of Science and Technology, Wuhan, 430074, China

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 57-60

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）