SENSITIVITY ANALYSIS OF LANGASITE SURFACE ACOUSTIC WAVE PRESSURE SENSORS
Langasite (La3Ga5SiO14, LGS) surface acoustic wave (SAW) pressure sensors can be applied to harsh enviroments above 500℃.The pressure sensitivity has significant effects on the accuracy of pressure measurement.The optimization of pressure sensitivity based on some factors such as substrate cuts and packaging structures has been reported.However, there is no report about the comprehensive influence of sealed cavity size and SAW sensor position on the pressure sensitivity for different cuts.In this paper, the SAW pressure sensitivity was simulated by combining the finite element method (FEM) and the perturbation theory to analyze the influence of the shape and size of sealed cavities, and sensor positions with different substrate cuts based on face pressing structure.As a result, these factors affected the sensitivity comprehensively.Thus, it is helpful to take more factors into account to improve sensitivity.
Langasite Surface acoustic wave Pressure sensitivity
Fei-da CAI Hong-lang LI Ya-bing KE Ya-hui TIAN Wei LUO Shi-tang HE Bin HU
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China;University of Chinese Aca Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China Huazhong University of Science and Technology, Wuhan 430074, China Beijing Municipal Institute of Labour Protection, Beijing 100054, China
国际会议
The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)
成都
英文
77-80
2017-10-27（万方平台首次上网日期，不代表论文的发表时间）