COUPLING VIBRATIONS OF THIN FILM BULK ACOUSTIC WAVE FILTERS

摘要：

　　In this paper, we study the mode coupling vibrations of a four-layered piezoelectric thin film bulk acoustic wave filter with two pairs of electrodes symmetrically deposited on the center of the zinc oxide film by a two-dimension plate theory established in our previous work.It takes into account the coupling of the thickness-extensional mode to the extensional, flexural, fundamental and second-order thickness-shear modes.Mindlins approach of using a power series expansion of the displacement field in the plate thickness coordinate was employed.The propagation of straight-crested waves in the plate was studied in detail.It is shown that the choice of ratio of length to thickness has a great effect on mode couplings of filters, which is quite significant in filter design.

关键词： FBAR Filter Mindlins theory Mode couplings Energy trapping

作者: Hao-yu HUANG Nian LI Bin WANG Zheng-hua QIAN

作者单位: State Key Laboratory of Mechanics and Control of Mechanical Structures / College of Aerospace Engineering,Nanjing University of Aeronautics and Astronautics, Nanjing, China, 210016

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 107-111

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）