INFLUENCES OF REFLECTORS FOR HIGH QUALITY FACTOR IN PIEZOELECTRIC ALN/SOI LAMB WAVE SENSORS

摘要：

　　High quality factor (Q) is desirable for achieving high signal-to-noise ratio (hence high resolution) in the aluminum nitride (A1N) based piezoelectric Lamb wave sensors.In order to investigate the influences of reflectors for Q factors in the Lamb wave sensors, three types of device configuration including the delay-line configuration (DLC), the double end reflectors inside (DERIM) and outside (DEROM) the AIN/SOI membrane, are analyzed by theoretical simulation.Compared with the DLC configuration, the DEROM exhibits a much larger Q factor in the lowest symmetric mode (S0 mode) and approximately the same value in the lowest anti-symmetry mode (A0 mode).We conclude that the So mode propagates in a transverse state which is affected directly by reflectors above the piezoelectric AIN layer, while the A0 mode is determined by the longitudinal excitation.The DERIM configuration presents a much lower Q factor than the DLC and the DEROM, because relative energy excited by the IDTs is not as enough as other two types.

关键词： Lamb wave High quality factor Reflectors,Aluminum Nitride (AIN)

作者: Chuan-yu LI Jing LI Long LI Jia YAO Zhen GUO Yu-guo TANG Lian-qun ZHOU

作者单位: CAS Key Lab of Bio-Medical Diagnostics, Suzhou Institute of Biomedical Engineering and Technology,Ch Suzhou Institute of Measurement and Testing, Suzhou, 215128, China CAS Key Lab of Bio-Medical Diagnostics, Suzhou Institute of Biomedical Engineering and Technology,Ch

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 112-116

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）