STRUCTURAL OPTIMIZATION OF PARTIALLY RING-ELECTRODED ZNO THIN FILM RESONATOR

摘要：

　　A design of ring electrode deposited on a rectangular ZnO thin film is proposed in this paper to demonstrate the existence of a nearly uniform displacement distribution at the central part of this kind of resonators.A variational formulation constructed based on a scalar equation provides a theoretical basis for Ritz method in our analysis.The mode shapes of the fundamental thickness-stretch mode of this ring-electroded resonator are obtained.The structural parameters of the ring electrode are optimized in order to achieve a relatively flat vibration region, which guarantees a higher accuracy and repeatable measurement for sensing detection in an air or liquid environment.These results can provide a fundamental reference of the design and optimization of structural parameters of a high quality sensor.

关键词： Resonator Ring electrode Ritz method Scalar equation Sensing application

作者: Zi-nan ZHAO Bin WANG Zheng-hua QIAN

作者单位: State Key Laboratory of Mechanics and Control of Mechanical Structures / College of Aerospace Engineering,Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 125-128

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）