EFFECT OF ELECTRODE WIDTH ON THE SENSITIVITY OF THE SURFACE ACOUSTIC WAVE DETECTOR IN A GC/SAW

摘要：

　　This paper analyzes the effect of electrode width on the sensitivity of the surface acoustic wave (SAW) detector in a GC/SAW.By using the finite element method (FEM) and the COMSOL software, the coupling-of-modes (COM) parameters of the SAW detector with different electrode width are quickly and accurately extracted.Based on the COM model and P-matrix cascading technique, the frequency responses of the detector are simulated with different electrode width and the sensitivity of the SAW detector corresponding to the different width of the IDT are obtained.The theoretical results provide the foundation for further experimental research.

关键词： SAW sensor Sensitivity Electrode width

作者: Yan AN Wen-chang HAO Jiu-ling LIU Shi-tang HE

作者单位: Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R.China;University of Chinese Academ Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R.China

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 139-141

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）