WAVE PROPAGATION IN STRUCTURES OF FILM BULK ACOUSTIC RESONATORS WITH DIELECTRIC LOSS
Dielectric loss is inevitable for many piezoelectric materials and it will lead to the dissipation of energy for wave motion.In this paper, we study wave propagation in piezoelectric layered structure of the thin film bulk acoustic resonator (FBAR) with dielectric loss.When the dielectric loss is considered, dielectric constants are complex and the waves are damped which means wavenumber is complex.Thus, the dispersion equations were derived first, and then three dimensional dispersion curves were given in the range of real frequency and complex wavenumber.Further analyses on the characteristics of the wave were made based on the 3D dispersion curves, and the attenuation of the wave was shown.A comparison with the results obtained from the model without dielectric loss was also discussed.
Wave propagation Piezoelectric layered structure Dielectric loss 3D dispersion curves
Feng ZHU Bin WANG Zheng-hua QIAN
State Key Laboratory of Mechanics and Control of Mechanical Structures / College of Aerospace Engineering,Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, China
国际会议
The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)
成都
英文
193-196
2017-10-27（万方平台首次上网日期，不代表论文的发表时间）