INVESTIGATION OF INCREDIBLE HIGH PERFORMANCE SURFACE ACOUSTIC WAVE PROPERTIES WITH A STRUCTURE OF IDT/θ°YX-LiTaO3/SiO2/AlN/Silicon

摘要：

　　Recently, an Incredible High Performance (IHP) SAW structure was released by Murata Co., Ltd, which is composed by a combination of thin piezoelectric material with a Bragg reflector stack.Such structure can concentrate the energy of leaky SAW, and achieve a higher quality factor and coupling factor of SAW resonators.In this paper, we have investigated such kind of IHP SAW with a structure of IDT/θ° YX-LiTaO3/SiO2/AIN/Silicon for deep understanding of the SAWs propagating characteristics.We have calculated the relative input admittance of the IHP SAW propagating on 42° YX-LiTaO3/SiO2/AIN/Silicon.We have calculated displacement filed distributions for the main and spurious modes, and evaluated the electro-mechanical coupling coefficient (K2), velocities at resonance frequency (Vr) and anti-resonance frequency (Va) with different electrode materials and metal thickness.Such performance was also optimized by changing the structure parameters of piezoelectric layer thickness and Euler angle.

关键词： SAW properties IHP SAW Structure parameters Optimization

作者: Qiang XIAO Chao-hui DONG Xiao-jun JI Ping Cai Jing CHEN

作者单位: School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 197-201

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）