会议专题

MODEL OF SCANDIUM DOPED ALUMINUM NITRIDE BASED PMUT WITH HIGH TRANSMITTING PERFORMANCE

  A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) model with high transmitting performance is established.30% concentration scandium doped aluminum nitride film is used as piezoelectric material for the established MEMS model of PMUT.The expressions of PMUT vibration modes are given.The influence of PMUT structure on its transmitting sensitivity and receiving sensitivity is calculated.Through the frequency response of PMUT in medium, the influence of top electrode radius on resonant modes and transmitting parameters of PMUT is analyzed.Results show that (0,1) mode work in omni-directional mode, (0,2) mode operating in hypercardioid mode, and reasonable control of top electrode radius can be effective for designing target uses of PMUT.

PMUT FEM Scandium doping Resonant mode

Jia-qi GUO Chi-chao LIU Tao HAN Jian-min MIAO

Shanghai Jiao Tong University, Shanghai 200240, China Nanyang Technological University, Singapore 639798, Singapore

国际会议

The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

成都

英文

211-216

2017-10-27(万方平台首次上网日期,不代表论文的发表时间)