NUMERICAL ANALYSIS OF THE PERFORMANCE OF MICROFLOWN WITH SHS CONFIGURATION

摘要：

　　In this paper, the microflown with SHS configuration is analyzed by numerical simulation.Compared to conventional acoustic sensors, microflown measures the particle velocity rather than the sound pressure.It has three resistors, two outermost resistors of which are used as sensors, while the resistor located in the middle is used as a heater.As air flows across the sensor, upstream resistor cools down and gives off some heat to the passing air.Hence, downstream resistors lose less heat because the warmer air passes through.The temperature difference can be calculated and analyzed by assuming the ideal circuit structure for the microflown with SHS configuration, respectively.

关键词： Microflown Numerical simulation Acoustic sensors SHS configuration

作者: Jie-nan SHEN Bao-lin LIU Lin-hui ZHU Ma-hui XU Yi-bo ZENG Hang GUO

作者单位: College of Physical Science and Technology, Xiamen University, Xiamen, China, 361005;Pen-Tung Sah In College of Physical Science and Technology, Xiamen University, Xiamen, China, 361005 Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China, 36100 School of Physical Science and Technology, Xiamen University, Xiamen 361005

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 283-287

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）