NOISE ANALYSIS OF THE TRIAXIAL PIEZOELECTRIC MICRO-ACCELEROMETER

摘要：

　　Noise is a major factor that constrains the performance improvement of piezoelectric micro-accelerometer in dealing with weak signals.This paper studies the noise source of piezoelectric accelerometer, which is based on theory and characteristics of noise.The background noise of the piezoelectric micro-accelerometer is composed of the mechanical thermal noise and the piezoelectric element noise.The mechanical thermal noise and noise of the piezoelectric element are modeled by the theory of thermodynamics and the noise characteristics of the integrated circuit.By modeling, analysis and calculation, it can be obtained the noise value of the mechanical thermal and the piezoelectric element are 1.53×10-2μg/f1/2 and 3.6×l0-2μg/f1/2 respectively.

关键词： Piezoelectric accelerometer Noise modeling Mechanical thermal noise Piezoelectric element noise

作者: Ma-hui XU Yong-jian FENG Hui ZHOU Jie-nan SHENG Lin-hui ZHU Peng HU Rui HAO Yi-bo ZENG Hang GUO

作者单位: School of Aerospace Engineering, Xiamen University, Xiamen 361005;Xiamen University, Pen-Tung Sah In School of Aerospace Engineering, Xiamen University, Xiamen 361005 Xiamen University, Pen-Tung Sah Institution of Micro-Nano Science and Technology, Xiamen 361005;Xiam Xiamen University, Pen-Tung Sah Institution of Micro-Nano Science and Technology, Xiamen 361005

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 288-292

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）