STUDY ON CROSS-SENSITIVITY OF TEMPERATURE AND STRAIN OF SURFACE ACOUSTIC WAVE STRAIN SENSOR

摘要：

　　In this paper, a method is proposed to solve the cross-sensitivity of strain and temperature of SAW strain sensor.In theory, the formulas of the frequency variant of resonators relate to temperature and strain are deduced by perturbation theory and the finite element method.Then the decoupling formulas to calculate the strain and temperature from two resonators frequencies are derived.In experiment, two resonators are fabricated on Y+34°quartz substrate, the frequencies of two resonators are measured at 0℃~80℃ and 0~400με.The coefficients of the above decoupling formulas are calibrated.The temperature and strain values are obtained by the frequencies of the resonators and the decoupling formulas.Compared with the referred temperature and strain in the experiment, the error of temperature is less than 2℃, and the error of strain is less than 10%, which verify the feasibility of the decoupling method.

关键词： (Surface Acoustic Wave)SAW Strain sensor Cross-sensitivity Temperature and strain decoupling

作者: Xing GAO Hong-lang LI Li-na CHENG Ya-bing KE Ya-hui TIAN Jin-ling Chen

作者单位: Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R.China, 100190;University of Chines Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R.China, 100190 Chengdu Sen suo er Technology Co., Ltd., Chengdu, P.R.China, 610000

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 444-447

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）