ANALYSIS ON SAW DEVICE OF LINBO3 FILM WITH MULTI-LAYERED MEDIA
In this paper, the propagation of the surface acoustic wave (SAW) in LiNbO3 structure with multi-layered media is introduced.The SAW devices with LiNbO3 structure are simulated by finite element methods, symmetry and anti-symmetry resonance modes of vibration with the corresponding resonant frequency are obtained.The effects of interdigital transducer (IDT)parameters on the performance of the device are analyzed;the changes in resonance frequency of SAW device due to the electrical loading are studied for various metallization ratios and thickness of the interdigital transducer.According to the simulation results and technological conditions, the optimum parameters areselected for the design of the gas sensor.With the concentration-frequency coefficient is approximatelyl.412 ppm/Hz, which has an excellent linear relationship.
Lithium niobate Multi-layered media Surface acoustic wave FEM
Ming-quan KAN Jian-ke DU Li-wen HE
School of Mechanical Engineering and Mechanics, Ningbo University, 818 Fenghua Road, Ningbo, Zhejiang, China,315211
国际会议
The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)
成都
英文
476-480
2017-10-27（万方平台首次上网日期，不代表论文的发表时间）