STUDY ON CHARACTERISTICS OF SURFACE ACOUSTIC WAVE BASED ON (110)ScAIN/R-SAPPHIRE STRUCTRUE
The propagation characteristics of surface acoustic wave (SAW) in IDT/(110)ScAIN/R-sapphire, including the Rayleigh wave propagating along 001 direction and Love wave propagating along 100 direction, are investigated by 3 dimension-finite element method (3D-FEM).The phase velocity (vp), electromechanical coupling coefficient (k2) and mass sensitivity (Sm) of first two orders of Rayleigh wave and Love wave are calculated.The simulated results show that the mode 0 of SAWs has better performances than that of mode 1.The mode 0 of Rayleigh wave shows the maximum k2 of 3.57% as h/λ=l associated with vp of 3676 m/s and Sm of 23.6 m2/kg;and the mode 0 of Love wave exhibits the maximum k2 of 6.39% as h/λ=0.33 associated with vp of 4644 m/s and Sm of 38.3 m2/kg.The results indicate that (ll0)ScAIN/R-sapphire structure can be used for the fabrication of SAW devices with high frequency and good sensitivity.
ScAIN R-sapphire electromechanical coupling coefficient mass sensitivity
Jing XU Yan WANG Zhi-jie JIA Ying-cai XIE
School of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Na School of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Na
国际会议
The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)
成都
英文
519-523
2017-10-27（万方平台首次上网日期，不代表论文的发表时间）