ON THE MEASURING CIRCUIT OF PIEZOELECTRIC ACCELEROMETERS

摘要：

　　Due to its excellent dynamic performance for vibration measurement, MEMS-based piezoelectric accelerometer has been studied in recent years.Piezoelectric micro-accelerometer can be regarded as a component that can produce electric charge with high internal impedance, but the quantity of electric charge is very subtle.By taking this into account, the general measuring circuit does not meet the requirement.In this paper, a charge amplifier with an integrated chip is used instead of a large number of discrete components, and cold-discharge design is also included to decrease the thermal noise of the whole circuit.

关键词： MEMS-based piezoelectric accelerometer charge amplifier cold-discharge design

作者: Hui ZHOU Ma-hui XU Hu Peng Lin-hui ZHU Yi-bo ZENG Hang GUO

作者单位: College of Physical Science and Technology, Xiamen University, Xiamen, China, 361005 Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China, 36100 Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China, 36100 College of Physical Science and Technology, Xiamen University, Xiamen, China, 361005;Pen-Tung Sah In

会议类型: 国际会议

会议名称: The 2017 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2017全国压电和声波理论及器件技术研讨会)

会议地点: 成都

会议语种:英文

页码: 524-527

在线出版日期: 2017-10-27（万方平台首次上网日期，不代表论文的发表时间）