Effects Studying of Annealing to Mechanical Properties Carbon-Doped Ti-O Films Synthesized Using CO2 Gas

摘要：

　　Carbon-doped Ti-O films were deposited on steel and silicon wafer by DC reaction magnetron sputtering(R-MS) using CO2 as carbon and oxygen source.A series of films were prepared by means of changing the flow of CO2 or O2.The effects of annealing temperature ranging from 300 to 650℃ on the properties of Ti-O films under vacuum were studied.X-ray diffraction (XRD) and field emission scanning electronic microscope (FESEM) were employed to analyze and observe structure and morphology ofpre-or after-annealed Ti-O films.Nano-indentation was used to measure nano-hardness and modulus, and recovery was also calculated by the curves of load-displacement.Roughness and thickness were estimated by surface profiler.The XRD studies revealed that the doping of carbon was beneficial to the crystallization of the films.The results showed that the particle size of Ti-O films increased with the increase of annealing temperature, as-annealed carbon-doped Ti-O films have fair mechanical performance.

关键词： Carbon-doped Ti-O films Magnetron sputtering Nano-indenation CO2

作者: Hong-wu Liu Yong-yao Su Xiao-yu Huang Jian-lu Xue Feng Wen

作者单位: School of Materials and Chemical Engineering, Hainan University, Haikou 570228, P.R.China Research institute for new material technology, Chongqing University of Arts and Sciences, Chongqing School of Materials and Chemical Engineering, Hainan University, Haikou 570228, P.R.China;School of

会议类型: 国际会议

会议名称: The 2016 China Functional Materials Technology and Industry Forum (2016中国国际功能材料大会暨第九届中国功能材料及其应用学术会议)

会议地点: 重庆

会议语种:英文

页码: 915-922

在线出版日期: 2016-07-25（万方平台首次上网日期，不代表论文的发表时间）