Research on Composite Manufacturing Technology of Micro and Meso Scale Groove/Steps

摘要：

　　To acquire micro and meso scale groove/steps with feature size of 10 μm~10 mm, due to the difficulty of guaranteeing the precision by traditional processing method, this paper has put forward a new precision composite manufacturing technology in combination with precision machining technology and film compensation technology followed by theoretical analysis and experimental verification.In this paper, Crl 2MoV was chosen as the processing material, five-axis linkage machining center was used for precision cutting and hydrogenated amorphous carbon film was chosen as the compensation layer.Two sizes (400 μm and 700 μm) of grooves and steps were machined to verify the new composite manufacturing technology, which finally reached IT5 tolerance grade.

关键词： Micro and meso scale Precision machining Film compensation

作者: HUANG Lei YUAN Jun Tang HONG Dong Bo

作者单位: Jiangsu Engineering Laboratory of High-End Equipment Manufacturing Technology,Collaborative Innovation Center of High-End Equipment Manufacturing Technology,Nanjing University of Science and Technology, str.Xiaolingwei 200, Nanjing 210094, China

会议类型: 国际会议

会议名称: The 13th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP 2017) (第十三届中日超精密加工国际会议)

会议地点: 上海

会议语种:英文

页码: 117-120

在线出版日期: 2017-11-19（万方平台首次上网日期，不代表论文的发表时间）