Micro/nano machining of difficult-to-cut materials by applying elliptical vibration cutting
Textured surfaces with sophisticated micro/nano structures can provide interesting and advanced functions.Nowadays, elliptical vibration cutting (EVC) is attracting more and more attentions due to its excellent machining performances in micro/nano machining of difficult-to-cut materials.By applying single crystal diamond (SCD) tools, ultraprecision texturing of ferrous metals and hard-brittle materials, such as hardened steel, tungsten carbide and single crystal silicon, were carried out by applying EVC.Both the excellent machined surface quality and the high machining accuracy can be guaranteed with this novel method.A series of functional surfaces with sophisticated micro/nano structures were successfully fabricated, which can be applied to the molding, encoder,optoelectronics and semiconductor industries.The EVC technology is expected to promote the development of micro/nano machining process in the actual industrial applications.
Elliptical vibration cutting Micro/nano machining Difficult-to-cut materials
Jianguo Zhang Norikazu Suzuki Eiji Shamoto Tao Cui Cheng Ge Yongxin Sui Huaijiang Yang
Department of Aerospace Engineering, Nagoya University, Nagoya 464-8603, Japan;Changchun Institute o Department of Aerospace Engineering, Nagoya University, Nagoya 464-8603, Japan Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science,Changchun 1300
国际会议
上海
英文
145-148
2017-11-19（万方平台首次上网日期，不代表论文的发表时间）