Experimental Research on Laser-assisted Electrochemical Micromachining of Stainless Steel
In order to fabricate the micro patterns cavities with complex structures on stainless steel,laser-assisted electrochemical micromachining (EMM) based on surface modification by fiber laser masking was studied,and a new device of laser-assisted EMM was developed.Laser marking on the surface of 304 stainless steel can first be realized by fiber laser heating scanning.During laser marking, metal oxide layer with predefined pattern can be formed by laser marking, and phase transformation can also occur on the 304 stainless steel surface, which produce the laser masking layer with good corrosion resistance layer.The stainless steel surface with laser masking layer is subsequently etched by EMM, the laser masking layer severs as the temporary protective layer without relying on lithography mask, the fabrication of formed electrodes is also avoided, so micro pattern cavities can fast be fabricated.The impacts on machining accuracy during EMM with laser masking were discussed, the typical samples 23μm deep were fabricated under the optimized parameters.
Electrochemical micromachining Fiber laser Masking Stainless steel Combined machining
Li Xiaohai Wang Shuming Wang Dong Tong Han
School of Mechanical Engineering, Jiamusi University,Jiamusi, Heilongjiang, China School of Materials Science and Engineering, Jiamusi University, Jiamusi, Heilongjiang, China
国际会议
上海
英文
167-171
2017-11-19（万方平台首次上网日期，不代表论文的发表时间）