Force-controlled Diamond Cutting on Brittle Materials by Utilizing a Force Sensor Integrated Fast Tool Servo
Single point diamond cutting is an important technology for precision manufacturing of microstructures with nanometric surface finish and sub-micrometric form accuracy on brittle materials.From the point of view of practical applications, it is desired that diamond cutting of brittle materials can be carried out not only on planar substrates but also on non-planar substrates with high cutting efficiencies.This paper presents a force-controlled single point diamond cutting strategy, which can conduct precision cutting along non-planar brittle material substrates without prior knowledge of the substrate surface form, by utilizing a force sensor integrated fast tool servo (FS-FTS).Experiment setup is developed by mounting the FS-FTS system on a four-axis ultra-precision diamond cutting machine.To demonstrate the effectiveness and feasibility of proposed cutting strategy, force-controlled diamond cutting is conducted on inclined silicon substrate.The feasibility and effectiveness of the proposed cutting strategy are demonstrated by the experimental results.
force-controlled fast tool servo force sensor non-planar substrate diamond cutting brittle material
Bo Wen Yuan-Liu Chen Yuki Shimizu Wei Gao
Nanometrology Laboratory, Department of Finemechanics, Tohoku University,980-8579 Sendai, Japan
国际会议
上海
英文
173-176
2017-11-19（万方平台首次上网日期，不代表论文的发表时间）