The figure evolution simulation of the workpiece based on preston equation in the continuous polishing
The evolution of optics figure in continuous polishing is not clear, which seriously restricts its development to deterministic and time economy.Firstly, the model of single point material removal on the component is established based on the preston equation.The trajectory of the single point is discretized by time unit and the micro arc length is replaced by the linear distance between the two adjacent points.Then, the stress distribution varied with time of the contact surface is obtained by numerical simulation based on the elastic contact mechanics.Next,the interface stress distribution is substituted into the preston equation for iterative calculation to obtain the figure evolution of the workpiece.Finally, the experiment of fused silica element is carried out to compare with the numerical result.This research is meaningful to make the fabrication more repeatable and more iterative.
evolution of optics figure preston equation elastic contact mechanics the interface stress distribution
Feihu Zhang Lele Ren Defeng Liao
Harbin Institute of Technology, Harbin, 150001, China Harbin Institute of Technology, Harbin, 150001, China;Research Center of Laser Fusion,CAEP, Mian yan
国际会议
上海
英文
197-200
2017-11-19（万方平台首次上网日期，不代表论文的发表时间）