Design of a 3DOF Precision Positioning Stage Based on Corrugated Flexible Units

摘要：

　　Flexure hinge has been widely used in micro-positioning stages and medical applications to take the place of mechanical joints.In this paper,a planar three degree of freedom (DOF) precision positioning stage is designed with corrugated flexible units,which offers great improvement over traditional flexible hinge in terms of large range of motion.A first order displacement amplification mechanism is led into the stage to amplify the displacement and the stage is actuated by piezo actuator.Then the simulation and analysis of the stage are conducted by finite element analysis (FEA) via ANSYS,which validate the characteristic of large displacement of the stage and eliminating stress concentration effects.

关键词： Precision positioning stage Corrugated flexible units 3DOF FEA

作者: Nianfeng Wang Zhiyuan Zhang Xianmin Zhang Luming Cui

作者单位: Guangdong Provincial Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering,South China University of Technology, Guangzhou 510640, China

会议类型: 国际会议

会议名称: 2016中国机构与机器科学国际会议

会议地点: 广州

会议语种:英文

页码: 723-733

在线出版日期: 2016-12-15（万方平台首次上网日期，不代表论文的发表时间）