3D Image Reconstruction of Monocrystalline Silicon Internal Defects based on Ultrasonic Detection

摘要：

　　With the purpose of detecting the internal defects of monocrystalline silicon,an ultrasonic detection platform has been set up with the method of circle traversal detection combining transmission and reflection laws.Marching Cubes algorithm is applied on the 3D image reconstruction of the silicons internal structure to integrate and marginalize the defect information from different internal sections.Therefore,with this transparent processing method,the depth,size and shape of the internal defect can be acquired effectively,intuitively and accurately.The reconstruction experiments show the relative error of the defect diameter measurement is less than 4% comparing to the real measured value

关键词： ultrasonic circle traversal detection monocrystalline silicon defects 3D reconstruction

作者: Wu Wei Qiu Zong ming Huang Qiu hong Zhao Min Liu Yu bo

作者单位: Xian University of Technology, School of Mechanical and Precision Instrument Engineering, Xian ,710048, China

会议类型: 国际会议

会议名称: 2016 Sixth International Conference on Instrumentation and Measurement,Computer,Communication and Control (IMCCC2016)(第六届仪器测量、计算机通信与控制国际会议)

会议地点: 哈尔滨

会议语种:英文

页码: 951-955

在线出版日期: 2016-07-21（万方平台首次上网日期，不代表论文的发表时间）