A New Method for Circular Gratings Eccentricity Identification and Error Compensation

摘要：

　　The eccentricity is the main concern when installing a benchmark circular grating,because it accounts for the majority of the angular measurement error.A new method to identify the magnitude and direction of the eccentricity after the installation was proposed.Compared with models in the form of Fourier series,the model of the new method has fewer coefficients and a better error compensation effect.According to the calibration experiment,putting the new model into practical error compensation,the uncertainty of the angular measurement was reduced by 79.4%.

关键词： circular grating eccentric parameters identification calibration error compensation uncertainty analysis

作者: Su Zhikun Qiu Zurong Wang Chenglin Li Xinghua

作者单位: State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University Tianjin, China

会议类型: 国际会议

会议名称: 2015 Fifth International Conference on Instrumentation and Measurement,Computer,Communication and Control (IMCCC2015)(第五届仪器测量、计算机通信与控制国际会议)

会议地点: 秦皇岛

会议语种:英文

页码: 360-363

在线出版日期: 2015-09-18（万方平台首次上网日期，不代表论文的发表时间）