Laser-Assisted Waterjet Microgrooving of Silicon Nitride Ceramics with Near Damage-Free

摘要：

　　A new processing technology is used in micromachining silicon nitride ceramics for improving the processing efficiency.Laser-assisted waterjet machining technology with near damage-free plays an important role in reducing the heat-affected zone (HAZ).In order to understand the effects of process parameters, such as pulse energy, waterjet offset distance and water pressure, on microgrooving of silicon nitride ceramics and the machining performance, a full-factorial experiment with the comparison experiment has been carried out in this study for analyzing and discussing the groove geometry, the surface quality and HAZ width.It can be concluded that the laser-assisted waterjet processing technology can expel more material removal with near damage-free.

关键词： Silicon nitride ceramics Laser-assisted waterjet Microgrooving Damage-free

作者: Liang Wang Chuanzhen Huang Jun Wang Hongtao Zhu Peng Yao

作者单位: Center for Advanced Jet Engineering Technologies (CaJET), Key Laboratory of High-efficiency and Clean Mechanical Manufacture (Ministry of Education), School of Mechanical Engineering,Shandong University, Jinan, China, 250061

会议类型: 国际会议

会议名称: The 12th Asia-Pacific Conference on Materials Processing(APCMP2016)(第12届亚太材料加工会议)

会议地点: 青岛

会议语种:英文

页码: 69-74

在线出版日期: 2016-06-16（万方平台首次上网日期，不代表论文的发表时间）