Figure Error Correction of Ultra-Precision Optical Surfaces by Dual-Rotation Magnetorheological Finishing
Due to great demand of modem optical systems, many researches on Magnetorheological Finishing (MRF) technology have been carded out.To reduce figure error of optical surfaces,Dual-Rotation Magnetorheological Finishing (DRMRF) technology was studied.Customized Magnetorheological polishing fluid was developed and tested for rheological properties.A figure error correction experiment was conducted on a fused silica workpiece.Figure error was corrected from initial 110.549 nm PV (peak to valley) and 18.201 nm RMS (root mean square) of the whole surface (φ100 mm) to 21.474 nm PV and 2.513 nm RMS within optical aperture (φ96 mm).Results indicated Dual-Rotation Magnetorheological Finishing was effective for figure error correction of ultra-precision optical surfaces.
Magnetorheological Finishing MRF DRMRF figure error ultra-precision optical surface
Yuyue WANG Yun ZHANG Zhijing FENG
Department of Mechanical Engineering, Tsinghua University, Haidian District, Beijing, China;Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Haidian District, Beijing, China
国际会议
太原
英文
23-24
2015-05-22（万方平台首次上网日期，不代表论文的发表时间）