Study of Fabrication and Detection of An Nickel-Chromium Embedded Thin Film Sensor
Monitoring cutting force of manufacturing operations is important for controlling cutting process and quality of the workpiece surface.In this paper, a thin film of Nickel-chromium alloy sensor was designed, fabricated and detected.First, the substrate of Ti6Al4V alloy was compared with 45 steel according to the surface quality after grinding and polishing.The results showed that the surface quality of Ti6Al4V alloy after polishing can meet the requirements of sputtering film.Then, the films of sensor were spurred on the substrate of Ti6Al4V with DIBSD.The construction of the Nickel-chromium thin film as strained layer were detected through EDS and SEM.It can be seen that the film structure of Nickel-chromium alloy is dense, and composition of film is stable.
Embedded thin film sensor Nickel-Chromium alloy Fabrication Performance detection
Yunping Cheng Wenge Wu Xiaojun Du
School of Mechanical and Power Engineering, North University of China, Taiyuan, Shanxi, CHINA
国际会议
太原
英文
193-194
2015-05-22（万方平台首次上网日期，不代表论文的发表时间）