THICKNESS-EXTENSIONAL TRAPPED ENERGY VIBRATION OF ZNO THIN FILM BULK ACOUSTIC WAVE FILTERS
Thickness-extensional vibration of a rectangular piezoelectric thin film filter symmetrically covered with two driving electrodes was studied in this paper.The Tiersten and Stevens scalar equation was employed.The Ritz method based on the variational formulation constructed in our previous work was used with trigonometric series as basis functions.Free vibration modes and corresponding resonant frequencies were obtained,which shows that the modes can separate into symmetric modes and anti-symmetric modes for this symmetric structure.Trapped modes with vibration mainly under the top electrode regions were illustrated.The six corner-type regions of the filter neglected by Tiersten and Stevens for simplicity were considered in our analysis.Results show that their approximation may lead to an inaccuracy ranging from dozens to hundreds of ppm for the fundamental symmetric modes,which is severe to filter design and operation.
Thickness-extensional vibration Scalar equation Filter Trapped mode
Zi-nan ZHAO Zheng-hua QIAN Bin WANG
State Key Laboratory of Mechanics and Control of Mechanical Structures/College of Aerospace Engineering,Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
国际会议
The 2016 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2016全国压电和声波理论及器件技术研讨会)
西安
英文
23-26
2016-10-21（万方平台首次上网日期，不代表论文的发表时间）