A VARIATIONAL BEAM MODEL FOR MEMS DRIVEN BY ELECTROSTATIC AND PIEZOELECTRIC FORCES

摘要：

A size-dependent model of a micro-electromechanical system (MEMS) actuated by both electrostatic and piezoelectric forces is proposed based on the modified couple stress theory.The governing equation and boundary conditions are derived with the help of the Hamilton principle and solved numerically by employing the Galerkin method and Newton downhill method.A material length scale parameter (MLSP) is incorporated in the model to capture the size effect in microstructures.The results show that the piezoelectric voltage on the beam can reduce the electrostatic voltage dramatically and may guide the design of micro-devices.

关键词： Pull-in voltage Size effect Modified couple stress theory MEMS Piezoelectricity

作者: Ya-rong ZHOU Xu YANG Teng-hao YIN Bing-lei WANG

作者单位: Department of Engineering Mechanics, School of Civil Engineering, Shandong University, Jinan, 250061 Department of Engineering Mechanics, Zhejiang University, Hangzhou, 310027, P. R. China;Soft Matter

会议类型: 国际会议

会议名称: The 2016 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2016全国压电和声波理论及器件技术研讨会)

会议地点: 西安

会议语种:英文

页码: 53-56

在线出版日期: 2016-10-21（万方平台首次上网日期，不代表论文的发表时间）