STUDY OF A PIEZOELECTRIC ACCELEROMETER BASED ON D33 MODE

摘要：

A piezoelectric accelerometer based on d33 mode was studied in this work.It is comprised of multiple cantilever beams to support a central seismic mass.The piezoelectric PZT thin films and interdigital (IDT) electrodes are designed to be deposited on the surface of beams.The PZT thin film was in-plane polarized and worked in d33 mode.The accelerometer was fundamentally analyzed and designed by using finite element method in ANSYS.Results showed that the presented micro piezoelectric accelerometer in d33 mode can offer higher voltage output over that in d31 mode,significantly improving the sensitivity without lowering the bandwidth.

关键词： Piezoelectric accelerometer MEMS D33 mode D31 mode In-plane IDT electrodes

作者: Hui ZHOU Rui-hua HAN Ma-hui XU Hang GUO

作者单位: Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Fujian, 361000, Chin Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Fujian, 361000, Chin

会议类型: 国际会议

会议名称: The 2016 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2016全国压电和声波理论及器件技术研讨会)

会议地点: 西安

会议语种:英文

页码: 61-65

在线出版日期: 2016-10-21（万方平台首次上网日期，不代表论文的发表时间）