ANALYTICAL AND FINITE ELEMENT ANALYSIS OF A NEW TRI-AXIAL PIEZOELECTRIC ACCELEROMETER

摘要：

A new type of tri-axial piezoelectric accelerometer is proposed in this study.It consists of a seismic mass and four cantilever beams that is distributed in a shape of X.Analytical model and FEM analysis were conducted to study its charge sensitivity and the fundamental/first order resonance frequency in the Z-axis,X-axis and Y-axis direction.The errors between the calculated results from analytical model and that from the FEM analysis in ANSYS is about 8％ for the charge sensitivity and 12％ for the first-order resonance frequency.For a single chip with the same chip area,charge sensitivity of the proposed new X-shaped piezoelectric accelerometer is higher than that of the conventional cross-shaped piezoelectric accelerometer by 21％,which suggests that overall size of the accelerometer could be greatly reduced under the premise of meeting the design objectives.

关键词： X type structure Piezoelectric accelerometer Charge sensitivity Fundamental frequency Bandwidth

作者: Ma-hui XU Jian-yan WANG Rui-hua HAN Hui ZHOU Hang GUO

作者单位: Pen-Tung Sah Institution of Micro-Nano Science and Technology, Xiamen University, Fujian, 361005, Ch School of Physical Science and Technology, Xiamen University, Fujian, 361005, China;Pen-Tung Sah Ins

会议类型: 国际会议

会议名称: The 2016 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2016全国压电和声波理论及器件技术研讨会)

会议地点: 西安

会议语种:英文

页码: 71-75

在线出版日期: 2016-10-21（万方平台首次上网日期，不代表论文的发表时间）