ADVANCES IN A DEVELOPED SURFACE ACOUSTIC WAVE BASED PARTICULATE MATTER 2.5 MONITOR
This paper presented a surface acoustic wave (SAW) based particulate matter (PM) 2.5 monitor,which consisted of a SAW dual-resonator oscillator,a thermophoresis unit and a virtual impactor.The structure optimization for improving the performance of the sensor by considering the particle distribution deposited by thermophoresis on the SAW detector was analyzed and verified in experiments.The size of thermophoresis microchannel was obtained by Talbot formula and the movement of particles to the surface of the SAW detector was simulated by using the finite element method (FEM).Based on the theoretical results,the microchannel was fabricated and the thermophoresis distribution was observed under an optical microscope.The optimal monitoring structure of the SAW based PM2.5 monitor was established theoretically.
Particulate matter (PM) Surface Acoustic Wave Thermophoresis Deposition distribution Mass sensitivity
Wen-chang HAO Zhong NIE Jiu-ling LIU Ming-hua LIU Shi-tang HE
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China University of Science and Technology Beijing, Beijing 100083, China
国际会议
The 2016 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2016全国压电和声波理论及器件技术研讨会)
西安
英文
227-229
2016-10-21（万方平台首次上网日期，不代表论文的发表时间）