A NOVEL 2D PIEZO-NANOPOSITIONING STAGE BASED ON TRIANGLE AMPLIFIER MECHANISM

摘要：

Due to their high resolution and positioning accuracy,piezo-nanoposititioning stages are widely used in precision and ultra-precision fields.A nano-positioning platform with large travel range and bidirectional symmetrical output characteristic is proposed.Theoretical static model develops the relationships among output force,displacement,static stiffness and the structure parameters of the platform.Static analysis of the platform is carried out by ANSYS workbench.Finally,the theoretical and the finite element models are confirmed by experiments.The experimental results of the prototype show that the output performances in X and Y direction are similar and both of them are within an 8％ deviation from the theoretical value.The stroke of the stage reaches to 41.6μm and 42.9μm in X and Y directions respectively and is directly proportional to the amplitude of the input sinusoidal voltage of 10Hz.The minimum output displacement step is 50nm.The nano-positioning stage designed is featured with bidirectional symmetrical output characteristic and millisecond starting characteristic,with high positioning precision.

关键词： Triangle amplifier mechanism Flexure hinges Piezoelectric stacks Bidirectional driving

作者: Xue-rui LIU Wei-qing HUANG Yin WANG

作者单位: State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aerona College of Mechanical Engineering and Automation, Huaqiao University, Xiamen, 361021, China

会议类型: 国际会议

会议名称: The 2016 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2016全国压电和声波理论及器件技术研讨会)

会议地点: 西安

会议语种:英文

页码: 314-318

在线出版日期: 2016-10-21（万方平台首次上网日期，不代表论文的发表时间）