MASS SENSITIVITY OF ALUMINUM NITRIDE THIN FILM BASED SURFACE ACOUSTIC WAVE SENSORS PREPARED FOR BIOSENSING APPLICATION
Aluminum Nitride (AlN) based Surface Acoustic Wave(SAW)sensors have shown great application potentials on serving as biosensors.In this paper,we investigate the mass sensitivity of SAW sensors,which were fabricated based on Si/AlN structure by depositing aluminum oxide (Al2O3) thin films on the active area between the input port and output port of the SAW devices.The material of the IDTs is aluminum.To validate the sample accommodation and protection function of the SiN thin film in bio-liquid detection processes,the contact angle of the SiN surface is also detected.We found that the mass sensitivity of the SAW devices is as high as 1958 MHz/g and the SiN surface is hydrophilic with contact angle of 45 degree.The research results indicate the AlN based SAW devices can be well employed in certain biosensing applications.
SAW sensor AlN thin film Mass sensitivity Contact angle Biosensing
Ying-ge LI Lian-xiang MA P. M. SARRO Dong-xing DU Xue-feng LIU
College of Automation and Electrical Engineering, Qingdao University of Science and Technology, Qing College of Electromechanical Engineering, Qingdao University of Science and Technology, Qingdao, 266 Department of Microelectronics, Delft University of Technology, 2628CD, Delft, the Netherlands College of Automation and Electrical Engineering, Qingdao University of Science and Technology, Qing
国际会议
The 2016 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2016全国压电和声波理论及器件技术研讨会)
西安
英文
368-370
2016-10-21（万方平台首次上网日期，不代表论文的发表时间）