TWO-DIMENSIONAL ANALYSIS OF PIEZOELECTRIC THIN-FILM ACOUSTIC WAVE RESONATORS

摘要：

We derived a system of two-dimensional equations for thickness-extensional vibrations of a four-layered plate consisting of a piezoelectric thin film on an elastic substrate with driving and ground electrodes.It takes into consideration the couplings among the thickness-extensional mode to extensional,flexural,fundamental and second-order thickness-shear modes.Mindlin’s approach of using a power series expansion of the displacement field in the plate thickness coordinate was employed.The propagation of straight-crested waves in the plate was studied.Furthermore,we used these equations to analyze FBAR’s couplings vibrations,frequency spectra and mode shapes.It is shown that the equations obtained are very accurate for long waves in the plate.Free vibration results are helpful for the design of thin-film piezoelectric acoustic wave resonators to avoid the mode couplings.

关键词： Mindlin’s theory Piezoelectric plate FBAR Coupling vibrations Frequency spectra

作者: Nian LI Zheng-hua QIAN Bin WANG Jia-shi YANG

作者单位: State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Enginee Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 6858

会议类型: 国际会议

会议名称: The 2016 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2016全国压电和声波理论及器件技术研讨会)

会议地点: 西安

会议语种:英文

页码: 443-446

在线出版日期: 2016-10-21（万方平台首次上网日期，不代表论文的发表时间）