A Model for Thermoelastic Damping in Microbeams of Rhombic Cross-section

摘要：

　　This paper purposes to study thermoelastic damping in microbeams of rhombic cross-section.Detailed formulas are derived,for the first time,for the TED of rhombic cross-section.An approximation method is used to solve the two-dimensional heat conduction equation.The temperature field will be further derived by using the simplified procedure.The present model is validated by comparison with the finite element method (FEM) model.

关键词： MEMS Microbeam Thermoelastic damping Rhombic cross-section

作者: Sujie Lu Pu Li

作者单位: School of Mechanical Engineering, Southeast University, Jiangning, Nanjing, 211189, Peoples Republic of China

会议类型: 国际会议

会议名称: 2016 2nd International Conference on Mechanical, Electronic and Information Technology Engineering(2016机械、电子和信息技术国际会议)

会议地点: 重庆

会议语种:英文

页码: 10-15

在线出版日期: 2016-03-21（万方平台首次上网日期，不代表论文的发表时间）