A Squeeze Film Damping Model for a Torsion Micro-mirror with Coupling Effect Between Torsion and Bending
The prediction of squeeze film damping is very significant in designing high Q MEMS devices.In the past,there have been many analytical models studying the squeeze film damping of torsion micro-mirrors.However,the previous models didnt consider the coupling motion of torsion and bending.This paper presents an analytical model for squeeze film damping considering the coupling motion of torsion and bending.In this paper,the modified Reynolds equation is solved by using the double sine series and the pressure distribution in the gap is derived,then the squeeze film damping force and torque applied to the micro-plate are derived.By solving the coupled equations of torsion and bending,the expression of the quality factor of the model is obtained.The accuracy of the present model is verified by comparing its results with the finite element method(FEM) solutions.The limitations and conclusions of the model are presented at the final state.
Squeeze film damping Coupling effect MEMS Torsion micro-mirror
Chong Li Pu Li
School of Mechanical Engineering, Southeast University, Jiangning, Nanjing 211189, Peoples Republic of China
国际会议
重庆
英文
16-22
2016-03-21（万方平台首次上网日期，不代表论文的发表时间）