Study on the Measurement of Micro-capacitance Based on RLC Series Resonance and Increment

摘要：

　　Micro-capacitance cant be measured precisely with ordinary capacitance-meter because the meters measuring range is always high.Even if some capacitance-meters have a low range grade,it is difficult to measure the capacitance value accurately due to the parasitic capacitance in the circuit and the meter.A method of micro-capacitances measurement is put forward in this paper.This kind of method is based on principles of RLC series resonance and increment ingeniously.The lower capacitance,the higher quality factor is,so the more accurate resonant frequency can be measured,and the more accurate capacitance value can be received.Meanwhile,the value of parasitic capacitance can be eliminated smartly by means of increment.In this way,micro-capacitance can be measured accurately and easily.

关键词： micro-capacitance RLC series circuit resonance parasitic capacitance increment

作者: Zhou Huanyin Shen Tingyun Li Lirong Xu Feiyan Hu Jiewei Xie Yanhui

作者单位: College of Chemical Defense, Beijing 102205, China

会议类型: 国际会议

会议名称: 2016 2nd International Conference on Mechanical, Electronic and Information Technology Engineering(2016机械、电子和信息技术国际会议)

会议地点: 重庆

会议语种:英文

页码: 374-377

在线出版日期: 2016-03-21（万方平台首次上网日期，不代表论文的发表时间）