Optimization of anti-reflective GaAs nano-rods on solar cells

摘要：

　　A method of fabricating nano-rods on GaAs wafer using colloidal lithography and ICP dry etching is presented.The effect of diameter on anti-reflection performance is simulated,and experimentally investigated.A low reflectivity of 11.1%is measured.

作者: Nan Liu Yu Hu Jian-Jun He

作者单位: State Key Laboratory of Modern Optical Instrumentation,Department of Optical Engineering,Zhejiang University,Hangzhou,China,310027

会议类型: 国际会议

会议名称: 2014 Asia Communications and Photonics Conference(ACP2014)(2014亚洲通信与光子学大会)

会议地点: 上海

会议语种:英文

页码: 1-3

在线出版日期: 2014-11-11（万方平台首次上网日期，不代表论文的发表时间）