Design Method of a Guided-wave Optical Pressure Sensor Based on Dependences of Sensitivity and Resonance Frequency on Diaphragm Dimensions

摘要：

　　Designing a silicon-based guided-wave optical pressure sensor,consisting of a diaphragm and a waveguide across the diaphragm,was considered based on dependences of sensitivity and resonance frequency on diagram dimensions.

作者: Masashi Ohkawa Hiroyuki Nikkuni Takashi Sato

作者单位: Faculty of Engineering,Niigata University,8050 Ikarashi 2-no-cho,Nishi-ku,Niigata 950-2181,Japan

会议类型: 国际会议

会议名称: 2014 Asia Communications and Photonics Conference(ACP2014)(2014亚洲通信与光子学大会)

会议地点: 上海

会议语种:英文

页码: 1-3

在线出版日期: 2014-11-11（万方平台首次上网日期，不代表论文的发表时间）