Temporary Grating Coupler Structures Using Localised Refractive Index Engineering

摘要：

　　We demonstrate an erasable grating coupler which allows optical device testing throughout the fabrication process without impairing final circuit performance.Refractive index variation is introduced using ion implantation and can be subsequently removed using laser annealing.

作者: R.Topley G.Z.Mashanovich G.T.Reed G.Martinez-Jimenez L.OFaolain N.Healy S.Mailis D.J.Thomson F.Y.Gardes A.C.Peacock D.N.R.Payne

作者单位: Optoelectronics Research Centre,University of Southampton,UK SUPA,School of Physics and Astronomy,University of St.Andrews,UK Nano Research Group,ECS,University of Southampton,UK

会议类型: 国际会议

会议名称: 2014 Asia Communications and Photonics Conference(ACP2014)(2014亚洲通信与光子学大会)

会议地点: 上海

会议语种:英文

页码: 1-3

在线出版日期: 2014-11-11（万方平台首次上网日期，不代表论文的发表时间）