RESEARCH OF PROCESSING ERRORS ON MODAL FREQUENCY OF A DUAL-MASS DECOUPLED SILICON MICRO-GYROSCOPE
In this paper, the architecture, processing errors analysis and optimization method of a dual-mass silicon micro-gyroscope are presented. The dual-mass silicon micro-gyroscope consists of two identical single mass gyroscopes and a lever mechanism. Driving decoupling springs and sensing decoupling springs are key components to achieve motion decoupling. The processing error analysis indicates that the main influence of processing errors on modal frequency are width error of spring beams. The optimization method which increases the width of spring beams is adopted to reduce the effect of width errors on modal frequency. The structure optimization simulation results demonstrate that the frequency difference variation resulting from the processing errors decreased from 53.45% to 7.08% by increasing the width of spring beams.
silicon micro-gyroscope processing error modal frequency optimization
Hu Di Yang Bo Dai Bo
School of Instrument Science & Engineering, Southeast University, Nanjing 210096, China;Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China
国际会议
重庆
英文
426-430
2015-12-18（万方平台首次上网日期，不代表论文的发表时间）