Research on monocrystalline silicon defect detection based on wavelet singularity
In order to improve the process quality of monocrystalline silicon slicing, the analysis method based on the wavelet transform and the Lipschitz exponent was employed to explore the local singularity of defect detection signal for monocrystalline silicon through the self-built ultrasonic traversal detection platform. It was convenient to obtain the defect data and to complete a three-dimensional reconstruction of defects. Besides, the feasibility and availability of the method were validated by comparing the tested values which were obtained through the analysis of noise reduction of flaw signal using multiple wavelet bases. Experimental results reveal that the method can greatly improve the efficiency of slicing processes and the relative error is less than 4%. Meanwhile, this method can be widely used for the extraction of the ultrasonic signal eigenvalue and fault detection etc. with little computational complexity.
monocrystalline silicon defect wavelet transform Lipschitz exponent
Wu Wei Qiu Zongming Huang Qiu hong
Xian University of Technology, School of Mechanical and Precision Instrument Engineering, Xian ,710048, China
国际会议
重庆
英文
609-619
2015-12-18（万方平台首次上网日期，不代表论文的发表时间）