Influence research of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope

摘要：

　　Influence of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope is present in this paper. Firstly, the structure and operation principle a dual-mass silicon micro-gyroscope is introduced. Then the equation of amplitude ratio between left and right proof mass is deduced. Finally, the simulation analysis of fabrication errors on modal amplitude is implemented. The simulation results show the amplitude ratio is decreased to -1.2741 when the left proof mass error is 5% in anti-phase driving mode. The amplitude ratio is increased to -0.800 when the left stiffness error is 5% in anti-phase sensing mode.

关键词： silicon micro-gyroscope fabrication error amplitude ratio

作者: Hu Di Yang Bo Dai Bo

作者单位: School of Instrument Science & Engineering, Southeast University, Nanjing 210096, China;Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China

会议类型: 国际会议

会议名称: 2015 Joint International Mechanical,Electronic and Information Technology Conference(JIMET 2015)(2015 联合国际机械,电子与信息技术国际会议)

会议地点: 重庆

会议语种:英文

页码: 1199-1203

在线出版日期: 2015-12-18（万方平台首次上网日期，不代表论文的发表时间）