A novel Method to Fabricate AlN-Al2O3 Multiphase Ceramic Layer on WCu Alloy

摘要：

　　A novel approach for the fabrication of α-Al2O3,mullite(Al6Si2O13)and AlN multiphase ceramic layer on WCu via sintering process accompanied with mixing PCS/AlN composite slurry by ball milling was described.The sintering process parameters such as water vapor content and raw material ratio were mainly studied in this paper which greatly affected the formation of ceramic layers.At last,the interfacial reaction was also discussed between ceramic layer and WCu substrate.

关键词： power semiconductor multiphase ceramic layer PCS/AlN composite slurry mullite

作者: Jiandong Zhu Rong An Chunqing Wang Yanhong Tian Guangwu Wen

作者单位: State Key Laboratory of Advanced Welding and Joining,Harbin Institute of Technology,Harbin 150001,PR School of Material Science and Engineering,Harbin Institute of Technology,Harbin 150001,PR China

会议类型: 国际会议

会议名称: The 15th International Conference on Electronic Packaging Technology (ICEPT 2014) ) (第十五届电子封装技术国际会议)

会议地点: 成都

会议语种:英文

页码: 155-158

在线出版日期: 2014-08-12（万方平台首次上网日期，不代表论文的发表时间）