Vibration analysis of nanomechanical mass sensor based on circular graphene sheets
Graphene sheet(GS)is a two-dimensional(2D)material with extremely favorable mass sensor properties.In this paper,a linear elastic 2D plate model is applied to study the potential of a nanoscale mass sensor on individual GS.The simulated natural frequency was compared with the results obtained from the Rayleighs energy method.The effects of the attached mass,aspect ratio,and the layer number of the GS on the natural frequency are investigated in detail.Initial tension due to the fabrication process and temperature is also studied,which has effects on the frequency and frequency shift.The results show that the sensitivity of the mass sensor with smaller dimension is higher.The resolution of mass sensor can reach 1 zg and the sensitivity of seven-layer graphene mass sensor is the highest.Lower temperature has higher sensitivity and initial tension due to the fabrication process has little influence on the mass sensor.The conclusion is useful for the design of mass sensor with high resolution.
graphene sheet (GS) Rayleighs energy method mass sensor initial tension temperature nanomechanical
Xionghui Gong Shengwei Jiang Xuefang Wang Sheng Liu Shuo Wang
Institute for Microsystems,State Key Laboratory for Digital Manufacturing Equipment & Technology Sch Hubei Wuchang Experimental High School Wuhan,Hubei province,P.R.China
国际会议
The 15th International Conference on Electronic Packaging Technology (ICEPT 2014) ) (第十五届电子封装技术国际会议)
成都
英文
511-515
2014-08-12（万方平台首次上网日期，不代表论文的发表时间）