Finite element analysis of graphene resonator tuned by pressure difference

摘要：

　　The vibrational mechanical properties of a graphene resonator were investigated by finite element analysis(FEA)modeling and simulation.By applying a pressure difference across the membrane,the natural frequency of the graphene sheets is changed.The resonance frequency increases with increasing pressure difference.The maximum deflection occurs at the center of graphene.As the initial tension in the graphene increases,the tunable range decreases.Smaller the dimension of the graphene sheets is,higher the resonance frequency will be,and so as the tunable range.The thickness of the graphene sheets has the similar phenomenon as the dimension has,both the frequency and tunable range will increase if the thickness turns smaller.The geometric nonlinearity is considered,too.We compare the simulation results with previous theoretical and experimental results,and find them in good agreement.The pressure difference can be tuned by changing the pressure in and outside the microchamber.These conclusions will be helpful for graphene in the application of high-quality resonators.

关键词： resonator initial tension FEA pressure difference resonance frequency tunable range

作者: Xionghui Gong Shengwei Jiang Xuefang Wang Sheng Liu Shuo Wang

作者单位: Institute for Microsystems,State Key Laboratory for Digital Manufacturing Equipment & Technology Sch Hubei Wuchang Experimental High School Wuhan,Hubei province,P.R.China

会议类型: 国际会议

会议名称: The 15th International Conference on Electronic Packaging Technology (ICEPT 2014) ) (第十五届电子封装技术国际会议)

会议地点: 成都

会议语种:英文

页码: 516-519

在线出版日期: 2014-08-12（万方平台首次上网日期，不代表论文的发表时间）